CSEM-M Spray Photoresist Coating System
Product Description
Cheersonic is committed to various ultrasonic spraying solutions. Applied to semiconductor photoresist spraying, compared with traditional spin coating and dip coating, ultrasonic have the advantages of high uniformity and controllable coating area. Facts have proved that the photoresist coating prepared by ultrasonic coating has higher microstructure uniformity and uniformity than the traditional spin coating process. Ultrasonic spraying is a significantly efficient and economical photoresist coating process. Cheersonic’s spraying system has the characteristics of precision, flow control, and precise speed control. Due to the extremely low carrier gas volume, the liquid is gentle and non-impact during the spraying process, which greatly avoids the problem of liquid overspray and greatly improves the utilization rate of the liquid.
Key Features
• Ultrasonic nozzle, particle size is 0-40um
• High uniformity and uniformity
• Non-contact spraying
• Micro-flow spraying, multiple liquid feeding schemes
• High speed control accuracy
• High liquid utilization
Application
• Wafers
• MEMS
• Microfluidic Chips
• Lenses
• Filters
Parameter
| Ultrasonic spraying system | Frequency: 50khz, 60khz, 120khzSpraying width: 80mmParticle content: <10%Particle size: 10-40um | Liquid delivery(optional) | Ultrasonic dispersing syringe, Keep the suspension evenly dispersed during the spraying process |
| Nozzle alignment | Laser assisted alignment | Material of liquid tube | PTFE |
| Liquid utilization rate | 95% | Heating substrate（optional） | Maximum temperature: 400℃ |
| Spray uniformity | 5% | Temperature | 0-40℃ |
| Work area | 450 x 450 mm (17.71” x 17.71”) | Certifification | CE, ISO9001:2015 |
| Speed | XY: 300mm/secZ: 50mm/sec | Compressed air | 551.6 kPa (80 PSI) dryunlubricated air |
| Syringe pump | Flow rate: 0.01- 50ml/minOne syringe: up to 100mlTwo syringe: up to 50ml each | Power requirements | 220V, +/-10%, 50-60Hz,single phase |
| Control system | Self-developed 6-axis control system, 7-inch full-color touch LCD screen, can be set to automatic mode, jog debugging mode, with security system | Vacuum adsorption(optional) | 150C heat/vacPower of vacuum pump: <500wPumping speed: ≥60L/min |
| Motion accuracy | ±0.1mm | Dimensions | 1400L*900W*1600G mm |
| Motors | Digital AC servo motor drive | Weight | 650kg |
